AAO-based Si capacitor
Nanotubular metal-insulator–metal capacitor arrays for energy storage
The manufacturing of Si capacitors using AAO material was published in Nature Nanotechnology in 2009 as "Nanotubular metal–insulator–metal capacitor arrays for energy storage."
Silicon capacitors address the shortcomings of conventional MLCCs. They are manufactured by sequentially stacking metal-insulator-metal layers on a silicon substrate through semiconductor processes like atomic layer deposition (ALD). Especially in the case of trench types, the surface area is expanded by more than 1000 times compared to planar types, allowing for high capacitance in a small size.
Manufacturing process of Trench MIM Si capacitor using Hexapro's through hole type AAO.
Development of dry etching process for metal/insulating layers deposited via ALD
Development of selective etching process for MIM (metal-insulator-metal) layers for precise electrode pattern formation
Development of MIM chip dicing & packaging MEMS process
Development of ultra-high capacity Capacitor chip fabrication technology on 6/8-inch wafers
AAO-based Si capacitor
Nanotubular metal-insulator–metal capacitor arrays for energy storage
The manufacturing of Si capacitors using AAO material was published in Nature Nanotechnology in 2009 as "Nanotubular metal–insulator–metal capacitor arrays for energy storage."
Silicon capacitors address the shortcomings of conventional MLCCs. They are manufactured by sequentially stacking metal-insulator-metal layers on a silicon substrate through semiconductor processes like atomic layer deposition (ALD). Especially in the case of trench types, the surface area is expanded by more than 1000 times compared to planar types, allowing for high capacitance in a small size.
Manufacturing process of Trench MIM Si capacitor using Hexapro's through hole type AAO.
Corporate name Hexapro Co., Ltd.
CEO Kim Taesun
Personal Information Manager Kim Taesun
Head office 533, 55 Hanyang University Road, Sangnok-gu, Ansan-si, Gyeonggi-do, Korea
Research Center/Factory 105, 253-5 Wonsi-ro, Danwon-gu, Ansan-si, Gyeonggi-do, Korea
TEL 02-6497-3450
E-MAIL manager@hexapro.co.kr
COPYRIGHT (C) HEXAPRO. All Rights reserved
Corporate name Hexapro Co., Ltd.
CEO Kim Taesun Personal Information Manager Kim Taesun
Head office 533, 55 Hanyang University Road, Sangnok-gu, Ansan-si, Gyeonggi-do, Korea
Research Center/Factory 105, 253-5 Wonsi-ro, Danwon-gu, Ansan-si, Gyeonggi-do, Korea
TEL 02-6497-3450 E-MAIL manager@hexapro.co.kr
COPYRIGHT (C) HEXAPRO. All Rights reserved
